JPH0220825Y2 - - Google Patents

Info

Publication number
JPH0220825Y2
JPH0220825Y2 JP1984183095U JP18309584U JPH0220825Y2 JP H0220825 Y2 JPH0220825 Y2 JP H0220825Y2 JP 1984183095 U JP1984183095 U JP 1984183095U JP 18309584 U JP18309584 U JP 18309584U JP H0220825 Y2 JPH0220825 Y2 JP H0220825Y2
Authority
JP
Japan
Prior art keywords
heating element
element unit
housing
fork
heat treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984183095U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6197833U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984183095U priority Critical patent/JPH0220825Y2/ja
Publication of JPS6197833U publication Critical patent/JPS6197833U/ja
Application granted granted Critical
Publication of JPH0220825Y2 publication Critical patent/JPH0220825Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP1984183095U 1984-11-30 1984-11-30 Expired JPH0220825Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984183095U JPH0220825Y2 (en]) 1984-11-30 1984-11-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984183095U JPH0220825Y2 (en]) 1984-11-30 1984-11-30

Publications (2)

Publication Number Publication Date
JPS6197833U JPS6197833U (en]) 1986-06-23
JPH0220825Y2 true JPH0220825Y2 (en]) 1990-06-06

Family

ID=30740613

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984183095U Expired JPH0220825Y2 (en]) 1984-11-30 1984-11-30

Country Status (1)

Country Link
JP (1) JPH0220825Y2 (en])

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58138046A (ja) * 1982-02-12 1983-08-16 Mitsubishi Electric Corp ウエハ移替装置

Also Published As

Publication number Publication date
JPS6197833U (en]) 1986-06-23

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